resistance	ET	Wafer	position	Grp
1	5.22	1	1	1	1/1
2	5.61	1	1	2	1/1
3	6.11	1	1	3	1/1
4	6.33	1	1	4	1/1
5	6.13	1	2	1	1/2
6	6.14	1	2	2	1/2
7	5.6	1	2	3	1/2
8	5.91	1	2	4	1/2
9	5.49	1	3	1	1/3
10	4.6	1	3	2	1/3
11	4.95	1	3	3	1/3
12	5.42	1	3	4	1/3
13	5.78	2	1	1	2/1
14	6.52	2	1	2	2/1
15	5.9	2	1	3	2/1
16	5.67	2	1	4	2/1
17	5.77	2	2	1	2/2
18	6.23	2	2	2	2/2
19	5.57	2	2	3	2/2
20	5.96	2	2	4	2/2
21	6.43	2	3	1	2/3
22	5.81	2	3	2	2/3
23	5.83	2	3	3	2/3
24	6.12	2	3	4	2/3
25	5.66	3	1	1	3/1
26	6.25	3	1	2	3/1
27	5.46	3	1	3	3/1
28	5.08	3	1	4	3/1
29	6.53	3	2	1	3/2
30	6.5	3	2	2	3/2
31	6.23	3	2	3	3/2
32	6.84	3	2	4	3/2
33	6.22	3	3	1	3/3
34	6.29	3	3	2	3/3
35	5.63	3	3	3	3/3
36	6.36	3	3	4	3/3
37	6.75	4	1	1	4/1
38	6.97	4	1	2	4/1
39	6.02	4	1	3	4/1
40	6.88	4	1	4	4/1
41	6.22	4	2	1	4/2
42	6.54	4	2	2	4/2
43	6.12	4	2	3	4/2
44	6.61	4	2	4	4/2
45	6.05	4	3	1	4/3
46	6.15	4	3	2	4/3
47	5.55	4	3	3	4/3
48	6.13	4	3	4	4/3